| PLC
SYSTEM CONTROLLER
FULL AUTOMATIC CONTROL
HIDDEN MANUAL MODE
GRAPHIC DISPLAY PANEL
PLC CONTROLLER
COMPACT MOUNTING
CRYO, TURBO AND DIFFUSION PUMP
PROGRAMS
The HSD System Controller was designed to fully
automate vacuum system operation. This unit
provides outputs to actuate (7) system valves, (2)
pumps and (3) user definable devices. This
capacity allows "hands-off" control of pumpdown
from atmosphere to high vacuum as well as control
of heat, deposition, and other process equipment.
In addition to the standard pressure inputs
provided, (5) inputs are available for connection to
external monitoring devices, which can be used as
interlocks or process control inputs. This powerful
combination can provide control of a complete deposition cycle from high vacuum pumpdown to
gas inlet with shutter actuation, power application
and cycle termination.
A library of programs is available to allow control
of the various pumping mechanisms in current use. The cryo program provides automated pump
regeneration while the turbo program provides
"fail-safe" pump venting to prevent oil
back-migration. The diffusion pump program
provides a shut-down sequence to allow boiler cool-down before automatic backing pump
power-down.
|
SPECIFICATIONS
Ten foot interface cable to system valves & pump
contactors Manual mode provides secured access to toggle
switch control
of all outputs.
Floating 24VDC power supply for external contact
closure devices
(11) outputs are 120 VAC, 2 Amp rating with
output #12 isolated for use as interlock
Graphic panel with LED indication of output status
Shipped with choice of standard programs
Programs field changeable on 2764 EPROMs
700 word program capacity
Free software available for program development
Interface to G/P 307, 340 gauge controller with (6)
channel process control option
Dimensions:9/5" rack mount (may be 19" rack
mounted with ion gauge) 3.5" High, 11" Deep
OPTIONS
Battery backed RAM programs with RS232 port
allow PC system control, data acquisition or
program modification.
Custom designed programs
Interface cable to deposition controller
Power control module with circuit breakers and
starters for rough pump, high vacuum pump and
other equipment to be actuated by controller
|
